Investigation of Roll-to-Sheet Imprinting for the Fabrication of Thin-film Transistor Electrodes

نویسندگان

  • Hiroaki Koyama
  • Kazuhiro Fukada
  • Yoshitaka Murakami
  • Satoshi Inoue
  • Tatsuya Shimoda
چکیده

We applied a roll-to-sheet imprinting process to a largescale substrate. Patterned ruthenium oxide (RuO2) electrodes were fabricated on both glass and flexible substrates. The resistivity of the electrodes on a glass substrate was 3.5×10−5 Ω cm, which indicates that this technique is useful for the fabrication of thin-film transistor (TFT) electrodes. key words: Nano-rheology Printing, Oxide TFT, Printed Electronics, Printed TFT

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عنوان ژورنال:
  • IEICE Transactions

دوره 97-C  شماره 

صفحات  -

تاریخ انتشار 2014